As the semiconductor industry rapidly advances, production safety has become an increasingly prominent concern. During semiconductor plant operations, flammable gases, combustible dust, and flammable liquids can pose significant explosion risks. To effectively prevent and control such incidents, governments have issued relevant regulations, and insurance companies, as well as international organizations, have established strict safety standards, providing dual protection for enterprises.

Government Requirements

The “Improvement Plan for Fire Safety Management of Existing Factories,” approved by the Executive Yuan on September 8, 2022, emphasizes the importance of explosion venting, suppression, resistance, and isolation measures. This plan aims to strengthen the prevention and control of fire and explosion risks in factories. It mandates comprehensive safety measures to address potential explosive materials such as dust and gases, reducing the likelihood and severity of explosion incidents.

FM Standards

FM Global, a globally recognized property insurance and risk management organization, has developed a series of standards and data sheets specifically for explosion-proof safety in semiconductor plants. Among them, FM 7-7, FM 7-17, and FM 7-76 provide comprehensive guidelines and recommendations for explosion prevention.

Integrated Guidance from FM Data Sheets

FM Global’s data sheets offer detailed instructions for enhancing explosion-proof safety:

• Gas Safety: FM 7-7 recommends using Damage-Limiting Construction (DLC) in gas cylinder rooms with flammable or highly reactive gases and encourages non-combustible materials, effective housekeeping, and ignition source control.
• Active Protection: FM 7-17 suggests using explosion suppression systems as primary protection measures, along with explosion isolation flaps, and other explosion prevention solutions.
• Dust Hazard Management: FM 7-76 provides specific guidance for managing combustible dust, including explosibility analysis, explosion parameter measurement, hazard zone classification, and equipment selection. It also recommends using DustCalc software for precise explosion prevention calculations.
• Cross-Disciplinary Integration: FM 7-7 requires combustible dust processes and storage to comply with FM 7-76, demonstrating the interconnection and complementary nature of the data sheets.

Together, these data sheets establish a comprehensive explosion-proof safety framework, addressing multiple explosion risk sources and offering multi-layered safety strategies, from passive protection to active suppression.

Explosion-Proof Measures for Semiconductor Plant Equipment

To meet government requirements and comply with FM standards, semiconductor plants should focus on risk assessment, engineering controls, safety management, and explosion-proof equipment to enhance overall safety levels.

Risk Assessment

• Analyze flammable gases, combustible dust, and flammable liquids involved in production processes to identify potential explosion hazards.
• Conduct explosibility analysis and explosion parameter measurements for dust, providing scientific data for subsequent design and implementation of explosion-proof measures.

Engineering Controls

• Implement engineering solutions such as inert gas replacement, wet dust collection, and enclosed operations to reduce explosion triggers and probabilities.
• Calculate venting areas according to NFPA 68 standards, considering factors such as equipment volume, static activation pressure, and explosion release pressure. Provide precise layouts for venting devices.

Safety Management

• Establish a robust safety management system, including comprehensive operational procedures and emergency plans.
• Strengthen employee safety training to ensure awareness and preparedness for explosion-related risks.

Explosion-Proof Equipment Configuration

• Explosion Suppression System: Comprising detectors, control units, and suppressor dispersers to quickly contain flame propagation and control pressure surges at the onset of an explosion.
• Explosion Isolation Flap: Safely direct explosion pressure and flames to secure areas, preventing equipment damage.
• Explosion Isolation Flap: Rapidly shut off during explosions to prevent flame propagation through pipelines, effectively isolating the impact zone.

Conclusion

Explosion risks inherent in semiconductor plant operations cannot be ignored. By strictly adhering to government regulations and referencing FM standards, companies can significantly improve their explosion-proof safety measures.

Liansuo Construction Technology offers comprehensive explosion-proof solutions, including dust explosibility analysis, vent area calculations, FM-certified building venting (DLC measures), FM-certified explosion suppression systems, ATEX-certified vent panels, explosion isolation flaps, and other essential safety devices. These products and services comply with governmental and insurance requirements, providing reliable technical support and equipment guarantees for building robust explosion-proof safety systems in semiconductor plants. These efforts help enterprises create a safer and more stable production environment.